ADC
Analog-to-digital converter
 
AGC
Automatic gain control
 
AMOS
Active micro-optical system
 
APCVD
Atmospheric pressure chemical vapour deposition
 
APW
Acoustic plate mode
 
ASE
Anisotropic Silicon Etch
 
ASIC
Application-specific integrated circuit
 
Accelerometer
A sensor used to measure acceleration
 
BBR
Breathing bar resonator
 
BCC
Body-centred cubic
 
BGA
Ball grid array
 
BHF
Buffered hydrofluoric acid
 
BJT
Bipolar junction transistor
 
BPSG
Borophosphosilicate glass
 
BSG
Borosilicate glass
 
BiCMOS
Bipolar complementary metal oxide semiconductor
 
C-V
Current voltage
 
CAD
Computer aided design
 
CB
Common base (configuration)
 
CC
Common collector (configuration)
 
CCD
Charge-coupled device
 
CCR
Corner cube reflector
 
CD
Critical dimension
 
CE
Common emitter (configuration)
 
CFD
Computational fluid dynamics
 
CILJ
Central interface unit
 
CMOS
Complementary Metal Oxide Semiconductor
 
CMP
Chemical mechanical polish
 
CNC
Computer numerically controlled
 
COM
Coupling of mode
 
COP
Poly(glycidyl methacrylate co-ethyl acrylate)
 
COTS
Commercial off the shelf
 
CP
Conducting polymer
 
CPL
Capillary pumped loop
 
CPU
Central processing unit
 
CRT
Cathode ray tube
 
CTE
Coefficient of temperature expansion
 
CVD
Chemical vapor deposition
 
DES
Diethyl silane
 
DI
Deionised water
 
DILP
Dual-in-line package
 
DLP
Digital Light projection
 
DM
Deformable mirror
 
DMD
Digital micromirror device
 
DMOS
Diffused-channel MOS (process)
 
DO
Dissolved oxygen
 
DOE
Design of experiments
 
DOF
Degrees of freedom
 
DPIV
Digital particle image velocimetry
 
DRAM
Dynamic random access memory
 
DRIE
Deep reactive ion etch
 
DSE
Doping selective etching
 
DSP
Digital signal processor
 
DUV
Deep ultravioloet (light)
 
Dielectric Charging
Charge of a dielectric (an insulator), including a charge trapped on the surface
 
ECL
Emitter coupled logic
 
EDP
Ethylene-diamine-pyrocatechol
 
EDS
Energy dispersive spectroscopy
 
EFAB
Electrochemical fabrication
 
EGS
Electronic grade silicon
 
EM
Electromagnetic (radiation)
 
EPD
electrophoretic deposition
 
EPROM
Electronically erasable programmable read-only memory
 
ESV
Electrostatic voltmeter
 
FCC
Face-centred cubic
 
FDTS
Fluorodecyltrichlorosilane
 
FED
Field emission device
 
FEM
Finite element model
 
FET
Field-effect transistor
 
FFT
Fast Fourier transform
 
FM
Frequency modulated
 
FPGA
Field programmable gate array
 
FPW
Flexural plate wave
 
FS
Full-scale operation
 
FSPIV
Forward scattering particle image velocimetry
 
FTE
Full time equivalent
 
GaAs
Gallium arsenide
 
HCP
Hexagonal close packed
 
HF
Hydrofluoric acid
 
HMDS
Hexamethyl disilazane
 
HTCC
High-temperature co-fired ceramic
 
IAB
industrial advisory board
 
IC
integrated circuit
 
ICP
inductively coupled plasma
 
IH
Integrated harden resin
 
INFOMD
Integrated near field microfluidic devices
 
IOP
Intraocular pressure
 
JFET
junction field effect transistor
 
KOH
Potassium hydroxide
 
LCD
Liquid crystal display
 
LED
light emitting diode
 
LOCOS
Local oxide isolation of silicon
 
LPCVD
Low pressure chemical vapor deposition
 
LPF
Low pass filter
 
LTCC
Low-temperature co-fired ceramic
 
LTO
low temperature oxide
 
MAV
Micro air vehicle
 
MBE
Molecular beam epitaxy
 
MCM
Multichip module
 
MCU
Main control unit
 
MEMS
Microelectromechanical system
 
MFC
Mass-flow controller
 
MGS
Metallurgical-grade silicon
 
MISFET
Metal-insulator semiconductor field-effect transistor
 
MOEMS
Microoptoelectromechanical system
 
MOS
Metal oxide semiconductor
 
MOSFET
Metal oxide semiconductor field-effect transistor
 
MS
Methyl silane
 
MSL
Microstereolithography
 
MST
Microsystems technology
 
MUMPS
Multi user MEMS process service
 
MW
Molecular weight
 
Magnetometer
A sensor used to measure the inensity of an electric field
 
Mass Spectrometer
An instrument for identifying atomic, molecular and their concentration in different mediums
 
Mips
Million instructions per second
 
NAM
National Association of Manufacturers
 
NFO
Near-field optical
 
NRE
Nonretuming engineering (costs)
 
NSOM
Near-field scanning optical microscope
 
OCP
Open-circuit potential
 
OMA
Ohio MEMS Association
 
OTS
Octadecyl trichlorosilane
 
PAA
Programmable analogue array
 
PARC
Pattern recognition
 
PCB
Printed circuit board
 
PDMS
Polydimethylsiloxane
 
PDS
Parylene deposition system
 
PE
Piezoelectric
 
PECVD
Plasma enhanced chemical vapor deposition
 
PGA
Programmable gate array ,-
 
PHET
Photovoltaic electrochemical etchstop technique
 
PIV
Particle image velocimetry
 
PLA
Programmable logic array
 
PLD
Programmable logic device
 
PLL
Phase locked loop
 
PMMA
Polymethylmethacrylate (acrylic)
 
POEMS
Polymer opto electro mechanical systems
 
PP
Passivating potential
 
PSG
Phosphosilicate glass
 
PSI
Pounds per square inch
 
PTAT
Proportional to absolute temperature
 
PTFE
Poly(tetrafluoroethylene)
 
PTO
Lead titanate
 
PVC
Poly(vinyl chloride)
 
PVD
Physical vapour deposition
 
PVDF
Polyvinylidene fluoride
 
PWB
Printed wiring board
 
PZT
Lead zirconate titanate
 
QCM
Quartz crystal microbalance
 
RC
Resistance capacitance
 
REDOX
Reduction oxidation (reaction)
 
RF
Radio frequency
 
RIB
Reactive ion beam (milling)
 
RIE
Reactive ion etching aka RIB
 
RMS
Root-mean-square
 
ROG
Resonant output gyroscope
 
RTA
Rapid thermal annealing
 
RXL
Resonant accelerometer
 
Relay
An electromechanical or semiconductor switch in which a current or voltage applied across one port controls currents or voltages across another
 
SALT
Steered agile laser transceivers
 
SAM
Self assembled monolayer
 
SC
Simple cubic
 
SCREAM
Single-crystal reactive etching and metallisation (process)
 
SEM
Scanning electron microscope
 
SFF
Solid freeform fabrication
 
SIM
Stress induced martensite
 
SIMOX
Separation by implanted oxygen
 
SL
Stereolithography
 
SMA
Shape memory alloy
 
SMT
Surface mount technology
 
SNOM
Scanning near field optical microscopy
 
SOE
Silicon on epoxy
 
SOI
Silicon on insulator
 
STEC
Staggered torsional electrostatic combdrive
 
Stiction
A phenomenon that appears when a very strong interfacial adhesion force (capillary, Van der Walls, or electrostatic) is created between smooth contacting surfaces.
 
TAB
Tape-automated bonding
 
TCO
Temperature coefficient of operation
 
TCR
Temperature coefficient of resistance
 
TEOS
Tetraethylorthosilicate Si(OC2H5)4
 
TFT
Thin film transistor
 
TMAH
Tetramethylammonum hydroxide
 
TMS
Tetramethyl silane
 
TOS
Tensile optical surface
 
UHMWPE
Ultra high molecular weight polyethylene
 
UV
Ultraviolet (light)
 
VLSI
Very large-scale integration
 
VP
Vapour pressure
 
VPE
Vapour-phase epitaxy
 
keV
Kilo electronvolt
 
nMOS
n-type metal oxide semiconductor
 
p-n
Junction diode made from /?-type and n-type materials
 
pMOS
P-type metal oxide semiconductor
 
ppm
Parts per million